The Falcon F801 is a high-performance, fully automated wafer prober developed through a comprehensive architectural upgrade of the industry-classic 2001 system. By replacing legacy components and addressing design obsolescence, the F801 delivers superior stability, precision, and productivity, featuring 2KV highvoltage testing capability and the ability to handle warped wafers.
Equipped with an ultra-compact, collaborative-style robotic arm. It features high-sensitivity collision detection and active vibration suppression, achieving a repeatability of ±0.05mm and a 60% reduction in settling time.
Beyond standard flat/notch detection, it supports edge flatness inspection, wafer warpage measurement, and automatic cassette size identification.
Replaces legacy linear units with a high-conversion (80–95%) switching module. It provides stabilized 5V, 9V, ±12V, and ±28V DC outputs, eliminating system crashes and motor anomalies caused by voltage fluctuations.
Utilizes electronic solenoid valves and digital pressure switches for rapid response and leak prevention. Air pressure parameters can be monitored and calibrated in real-time via a digital display.
The system supports wafer handling with warpage exceeding 3mm, and even up to 10mm. The precisely controlled robotic arm ensures enhanced safety whether wafers are moving in/out of the cassette or being placed onto the
chuck.