Highly sensitive motion sensors features an integrated compact design with a small footprint. Machine dimensions are increased by less than 10%, offering high positioning accuracy and reliability.
Utilizes laser sensors to provide high-precision sensing. Applicable to a wide variety of
materials; ensures precise positioning even for semi-transparent materials. Optional
sensors can be integrated to measure wafer warpage.
Compatible with 4, 5, 6, and 8-inch cassettes. Equipped with sensors to automatically detect cassette presence and size.
Employs high-precision lasers to detect wafer status, such as double-slotting (cross-slotted) or abnormal tilting.
Automatically identifies the number of cassette slots (25/13 slots). (*Note: Requires the use of Mighty Prober or equivalent cassette models.)
No additional upgrades required; capable of handling/transferring wafers with up to 5mm deformation. (Note: Wafers must fit within the cassette safely without damage or dropping.)
No additional upgrades required; capable of handling/transferring wafers with up to 5mm deformation. (Note: Wafers must fit within the cassette safely without damage or dropping.)